SK hynix installed High-NA EUV scanner

3dnews.ru (Russian)

SK hynix installed its first High-NA EUV scanner, the ASML TwinScan EXE:5200B, to advance memory chip production. This new scanner, installed at their Icheon facility, can reduce transistor sizes by 1.7 times and increase density by 2.9 times compared to current EUV systems. Samsung Electronics also installed an ASML TwinScan EXE:5000 scanner in March for research, aiming for 1.4nm production by 2027.


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SK hynix installed High-NA EUV scanner | News Minimalist